Volume 5, Issue 3-1, May 2017, Page: 60-63
Preparation and Investigation of Diamond-Like Carbon Nanostructured Films
Zh. R. Panosyan, Laboratory of Helitechnic, National Polytechnic University of Armenia, Yerevan, Armenia
Received: Mar. 1, 2017;       Accepted: Mar. 3, 2017;       Published: Mar. 23, 2017
DOI: 10.11648/j.nano.s.2017050301.23      View  1289      Downloads  62
Abstract
A novel equipment of preparation of films by low temperature plasma assisted chemical vapor deposition (CVD) technique is built which allowed controlling the technological process in real-time mode. Diamond-like carbon (DLC) films were synthesized which exposed 99% transparency in wide range of spectrum, λ = 250 – 1100 nm. Also, technical modes using Ta2O5 stimulator were found allowing to obtain low resistivity of DLC as low as 310 – 4 Ohm cm at the optical transparency remaining as high as 85%. The features of the surface of films were studied by atomic force microscopy (AFM) and the layer adjacent to the surface by scanning electron microscopy (SEM). It is shown that stimulating centers on the substrate surface form nanotubes arranged parallel to the surface due to which electrical conductivity of the DLC film grows higher.
Keywords
Technology of Nanostructure, Diamond-Like Carbon Films, Plasma Enhanced CVD Method, Conductive and Transparent Films, AFM, SEM
To cite this article
Zh. R. Panosyan, Preparation and Investigation of Diamond-Like Carbon Nanostructured Films, American Journal of Nano Research and Applications. Special Issue:Nanotechnologies. Vol. 5, No. 3-1, 2017, pp. 60-63. doi: 10.11648/j.nano.s.2017050301.23
Copyright
Copyright © 2017 Authors retain the copyright of this article.
This article is an open access article distributed under the Creative Commons Attribution License (http://creativecommons.org/licenses/by/4.0/) which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Reference
[1]
H. Mariguchi, H. Ohara, M. Tsujioka, “History and applications of diamond-like carbon manufacturing processes,” SEI Tech. Rev., pp. 52-58, 2013.
[2]
J. Robertson, “Diamond-like amorphous carbon,” Mater. Sci. Eng., vol. R37, pp. 129-281, 2002.
[3]
S. S. Voskanyan, Y. V. Yengibaryan, K. G. Karapetyan, Zh. R. Panosyan, “Optical prperties of diamond-like carbon films,” J. Contemp. Phys. (Arm. Acad. Sci.), vol. 34, pp. 358-361, 1999.
[4]
K. S. Novoselov, “Graphene: Materials in the flatland,” Nobel Lecture, 2010 Dec 8, pp. 106-131, 2010.
[5]
Zh. R. Panosyan, A. V. Meliksetyan, S. S. Voskanyan, Y. V. Yengibaryan, A. A. Sahakyan, A. T. Darbasyan. “Observation of structural changes in carbon films under external influenses,” Diam. Rel. Mater., vol. 15, pp. 394-397, 2006.
[6]
Zh. R. Panosyan, A. T. Darbasyan, A. V. Meliksetyan, S. S. Voskanyan, A. S. Voskanyan, A. A. Sahakyan, R. V. Gzraryan, “Low resistive diamond-like carbon film development technique,” Thin Solid Films, vol. 517, pp. 5404-5408, 2009.
[7]
J. Pern, K. Touryan, Zh. Panosyan, A. Gippius, “Method and apparatures for making diamond-like carbon films,” US Patent No 7,459,188B2, 12 pp., Dec 2, 2008.
[8]
H. Zhu, J. Wei, K. Wang, D. Wu, “Applications of carbon materials in photovoltaic solar cells,” Solar Energy Mater. Solar Cells, vol. 93, pp. 1461-1470, 2009.
[9]
Zh. R. Panosyan, S. S. Voskanyan,Ye. V. Yengibaryan, M. G. Azaryan, A. A. Sahakyan, H. N. Yeritsyan, V. V. Harutyunyan, “Physical properties of conducting diamond-like carbon nanostructure films transparent in the visible range of light, deposited on silicon,” Nano Studies, vol. 10, pp. 67-76, 2014.
[10]
Y. Yamagata, A. Sharma, J. Narayan, “An improved electron scattering simulation at the mask in a project ion lithography system,” J. Appl. Phys., vol., 88, pp. 6861-6868, 2000.
[11]
N. A. Sanchez, C. Rincon, G. Zambrano, H. Galindo, P. Prieto, “Characterization of diamond-like carbon (DLC) thin films prepared by r.f. magnetron sputtering,” Thin Solid Films, vol. 373, pp. 247-250, 2000.
[12]
Zh. R. Panosyan, A. T. Darbasyan, S. S. Voskanyan, Y. V. Yengibaryan, “Methods for preporation of transparent conductive diamond-like carbon films and mechanisms of conductivity formation,” J. Contemp. Phys. (Arm. Acad. Sci.), vol. 49, pp. 286-292, 2014.
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